Development of the state-of-the-art manufacturing processes and measuring techniques for the green devices and machine elements
Member
The Main Research Topics
Ultra-Precision Manufacturing Technology - CMP(Chemical Mechanical Polishing) for energy saving device materials, Ultra-precision manufacturing and performance evaluation
Ultra-Precision Measuring Technology - Optical measurement & evaluation, R&D of 3D measurement and testing method
R&D of Creative Manufacturing Technique and Machines - Conformal coating and Electro spray application for MEMS, Low power laser processing with surface excitation
Medical Application of Manufacturing and Measuring Technology