Plasma is a key enabling technology widely used in advanced manufacturing, ranging from semiconductor fabrication to environmental and agricultural applications. In our research group, we study plasma science and engineering with a focus on understanding plasma–material interactions and developing next-generation plasma processes.
One of our main research themes is semiconductor plasma processing. We aim to advance plasma processes that support the manufacturing of cutting-edge devices such as AI chips by combining plasma diagnostics, materials analysis, and numerical simulations. In addition, we are developing AI models that incorporate knowledge from plasma physics and materials science to deepen our understanding of plasma phenomena and to enable more advanced plasma process design.
Our second research theme is plasma agriculture. We explore new agricultural technologies using plasma, including plasma irradiation of seeds to promote germination and plant growth, thereby improving crop yield. We also investigate the potential of new fertilizer technologies that utilize reactive nitrogen species generated by plasma to supply essential nitrogen nutrients to plants.
Through research that spans from fundamental science to real-world applications, we aim to contribute to the future of advanced manufacturing and to the solution of global societal challenges.
Member
The Main Research Topics
Development of Innovative Plasma Processes for Advanced Semiconductor Manufacturing
Development of AI Models Incorporating Plasma and Materials Science
Understanding Plasma–Surface Interactions
Creation of Plasma Agriculture Technologies